FEI Helios NanoLab 600 DualBeam (FIB/SEM)
Dual Beam FIBs are a relatively new type of instrumentation. They consist of a high-resolution SEM column with a fine-probe ion source (Focused Ion Beam). These instruments allow the preparation of samples from specific areas of a sample as well as nano-machining.
The Helios NanoLab™ 600 is equipped with an extremely high resolution Elstar™ electron column with a Field Emmission Gun (FEG) electron source. It is capable of <1nm @ 15kV and <2.5nm at 1kV electron beam resolution. The Ga+ ion source can image and machine down to 5nm resolution levels. Adding to the imaging and sputtering capabilities are a light element X-ray EDS detector and an electron back scatter diffraction orientation imaging camera. The OmniProbe AutoProbe™ 200 in-situ sample lift-out system allows the preparation of site specific TEM samples without the need for support films. This is necessary to fully utilize the high resolution capability of modern TEMs such as the Titan. The combined sputtering and imaging and analytical capability makes DualBeam FIBs extremely versatile and a key component in a world class nano-characterization facility.
The Nova NanoLab™ DualBeam FIB has high resolution electron (1.5nm) and ion (5nm) columns. The Nova is equipped with a Sirion™electron column with a Field Emmission Gun. It has high resolution capabilities with accelerating voltages ranging from 30kV to as low as 500V with an innovative "Through the Lens" detector technology. As of December of 2012 has been equipped with an OmniProbe AutoProbe™ 200 in-situ sample lift-out system. This allows the preparation of site specific TEM samples without the need for support films. The Nova has an integrated TSL EBSD package to allow for orientation imaging. The system also has "Run Script" and "Slice and View" scripting packages for 3-D reconstruction from serial sectioning (FIB-tomogrpahy) of the sample. The 3-D reconstructions are very important for understanding the the true 3 dimensional morphology of todays engineering materials. The Nova is equipped with light element EDS X-ray detector. The piezo electric stage is ideal for machining micro compression pillars for very small scale mechanical property testing. The Nova was recently equipped with a Nanomechanics InSEM mechanical properties microprobe. The InSEM features a precision nanomechanical actuator, which provides you with highly resolved force and displacement measurements. Now materials and micro compression pillar can be tested in situ even at elevated temperatures.